Ionizer that Delivers Ionized Gas for Balanced Charge Neutralization
Simco-Ion’s In-line Gas Ionizer Model 4210 when provided with gas from an ultra-clean source, operates 10 times better than Class 3 cleanroom requirements. Careful material selection and control of internal geometry ensure ultra-clean ionized gas delivery.
- Easily connects to delivery manifolds
- Ionizes either Clean Dry Air or Nitrogen
- IsoStat® technology
- Steady-state DC ion emission
- Ultra-clean emitter points (u/un models)
- Ultra-clean construction with carefully controlled current and geometry
TARGET APPLICATIONS
The 4210 has been used to solve static charge problems in a variety of wafer fab applications, including steppers, spin rinser dryers, load and unload stations, disk certifiers, wafer management systems, and furnaces.
SPECIFICATIONS
Input Voltage | 120 VAC, 50-60 Hz |
---|---|
Balance | ±25V |
Discharge | 4210 10 sec, 4210u 6 sec, 4210un 10 sec |
Ion Emissions | Steady-state DC |
Gas | CDA and/or Nitrogen |
Cleanliness | 4210 ISO 14644-1 Class 5; 4210u/4210un ISO 14644-1 Class 3 |
Dimension | 2.4D x 4.75L x 3.13W (6.1D x 12.1L x 8.0W cm) |
Weight | 37 oz (1.04 kg) |