Ionizing Bars Simco 5635

Simco-Ion’s AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

• ISO 14644-12 (0.01 µm particles) ionization
• ISO 14644 Class 1 (0.1 µm particles) cleanliness
• Modulated pulse technology
• Excellent lateral uniformity
• Low field voltages
• Air-assist capability
• Optional software with easy-to-use interface with wide adjustability
• Alarm output signal

TARGET APPLICATIONS