Features / Benefits
• Consumables info input: Entry of Film, Pad, Liquid info can be done with barcode scanner and touch panel -Manages Film service life
• “Add time” feature manages polishing time as per usage -Provides more uniformed geometry and extend film usage
• Pressure ramp-up and Fixed Height Mode available for each polishing step
• Wider speed adjustment range : 10-200 rpm
• Network connection by two methods: Modbus TCP/IP