Description
The XS series is Nordson Matrix`s flexible, small footprint inline AXI platform. The linear motors of the table and detector axes guarantee the highest possible speed and accuracy and make the XS machines the industry leading AXI solution for the semiconductor market.
Available Setups
- Semi-backend (High-resolution)
- Down to 3.2µm/pixel resolution
- Semi-backend (Ultra-high-resolution)
- Down to 2µm/pixel resolution
- Semi-frontend (Ultra-high-resolution + cleanroom cert.)
- Down to 0.8µm/pixel resolution
Available Configurations
The X# series machines feature the following configurations:
- XS2: 2D + SFT
- XS2.5: 2D + SFT + off-axis (2.5D)
- XS3: 2D + SFT + off-axis (2.5D) + Planar CT (3D)